Microsensor & Microinstrument System
Spring - 2024, 2022, 2021, 2020
RF MEMS Components & Applications
Fall - 2023, 2021, 2019
Important Links
Courses offered
Principle Investigator
Dr. Sheng Shian Li is a Professor & Principle Investigator of RFMEMS research group at INEMS, National Tsing Hua University, TAIWAN. He received the B.S. and M.S. degrees in Mechanical Engineering from National Taiwan University in 1996 and 1998, respectively. He received the M.S. and Ph.D. degrees from University of Michigan, Ann Arbor, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor. His current research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, front-end communication architectures, and integrated circuit design and technology. Dr. Li was a recipient of the Teaching Excellence Award and Young Faculty Research Award from the College of Engineering, National Tsing Hua University, in 2011 and 2012, respectively. In 2013, Dr. Li also received the Ta-Yu Wu Memorial Award, National Science Council, Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He served as the TPC of the IEEE International Frequency Control Symposium (IFCS), IEEE Sensors Conference, and ETPC of Transducers Conference. He also served as the local organizing committee chair for the 2014 IEEE IFCS and TPC vice chair (Group 1) for the 2016 IEEE IFCS, respectively.
Research Interest
RF MEMS
CMOS-MEMS resonators & filters, Piezoelectric MEMS resonators & filters, SOI capacitive resonators
Sensors
Thermal-piezoresistive resonantors (TPR) & thermal-piezoresistive oscillatos (TPO) for mass sensing, 3D array resosnant pressure sensors
Integrated Systems
Integrated MEMS oscillators, Temperature compensated MEMS oscillator, Interface circuits for sensors
Congratulations to Zhong-Wei for winning the Prof. Wen Ko's Best Paper Award (Third Prize) in APCOT 2023! 
