Principle Investigator

Dr. Sheng Shian Li is a Professor & Principle Investigator of RFMEMS research group at INEMS, National Tsing Hua University, TAIWAN. He received the B.S. and M.S. degrees in Mechanical Engineering from National Taiwan University in 1996 and 1998, respectively. He received the M.S. and Ph.D. degrees from University of Michigan, Ann Arbor, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor. His current research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, front-end communication architectures, and integrated circuit design and technology. Dr. Li was a recipient of the Teaching Excellence Award and Young Faculty Research Award from the College of Engineering, National Tsing Hua University, in 2011 and 2012, respectively. In 2013, Dr. Li also received the Ta-Yu Wu Memorial Award, National Science Council, Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He served as the TPC of the IEEE International Frequency Control Symposium (IFCS), IEEE Sensors Conference, and ETPC of Transducers Conference. He also served as the local organizing committee chair for the 2014 IEEE IFCS and TPC vice chair (Group 1) for the 2016 IEEE IFCS, respectively.


Research Interest



      CMOS-MEMS resonators & filters, Piezoelectric MEMS resonators & filters, SOI capacitive resonators


  • Sensors

      Thermal-piezoresistive resonantors (TPR) & thermal-piezoresistive oscillatos (TPO) for mass sensing, 3D array resosnant pressure sensors


  • Integrated Systems

      Integrated MEMS oscillators, Temperature compensated MEMS oscillator, Interface circuits for sensors

Recent News

  • Congratulations to Kalyani for winning the Prof. Wen Ko's Best Paper Award (Second Prize) in APCOT 2022!
  • Congratulations to Neil for winning the Best Paper Award (特優) in SNDCT 2022!
  • Congratulations to Dr. Gayathri Pillai. She joined as an Assistant Professor at Center for Nano Science and Engineering, Indian Institute of Science, Bengaluru, India in August 2021.
  • Congratulations to Dr. Ming-Huang Li. He joined as an Assistant Professor at the Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan in August 2019.
  • Congratulations to Gayathri for winning the CTCI Research Scholarship Award for International Graduate Students of 2019 CTCI Foundation Science and Technology!
  • Congratulations to Grace (方文琦) for winning the best industrial application award of the 21st Nano Engineering and Microsystem Technology Conference (第21屆奈米工程暨微系統技術研討會 最佳產業應用獎)!
  • Congratulations to Dr. Sukomal Dey. He joined Dept. of Electrical Engineering at IIT Palakkad as an Assistant Professor in August 2018.
  • Congratulations to Joe (陳昭瑜) receiving the MOST support for Graduate Student Study Abroad Program (科技部千里馬計畫). He will join ECE Dept. in the University of Illinois at Urbana-Champaign (UIUC) from April 2018.
  • Congratulations to Emily (劉廷淵) for winning HIWIN Master Thesis Award with Honorable Mention (第14屆上銀機械碩士論文獎-佳作). Emily now joins TDK-InvenSense as a MEMS engineer. <--(Click here)-->
  • Congratulations to Kevin (徐子軒) for his abstract selected as Student Best Paper Finalists in 2018 IEEE International Frequency Control Symposium (IFCS’18).
  • Congratulations to Gayathri, Emily (劉廷淵), and Grace (方文琦) for their work being selected to present in IEEE MEMS’18 (2 orals and 1 poster)!
  • Emily (劉廷淵) received the Best Oral Paper Award in Transducers’17 ! Congratulations! (Click here)
  • Congratulations to Jeff (劉峻佑) for winning the 2017 CIC Outstanding Chip Design Award: Best Design (2017 CIC 晶片製作 特優設計獎)!
  • Congratulations to Mike (周晉宇) for winning the 2017 CIC Outstanding Chip Design Award: Honorable Mention (2017 CIC 晶片製作 優良設計獎)!
  • Congratulations to Emily (劉廷淵) and Mike (周晉宇) for their work selected to be presented in Transducers’17 (Oral presentations)!
  • Three papers were presented in MEMS’17 by Joe (陳昭瑜), Anurag, and Andy (朱家君).


Contact us

RFMEMS Lab,Institute of NanoEngineering and MicroSystems,National Tsing Hua University
Hsinchu No. 101, Sec. 2, Kuang-Fu Rd., Taiwan 30013

Office:Room 616, Engineering Building I





Recent work