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RF MicroSystems Lab, NTHU

PUBLICATIONS

 

Journal Papers:

  1. K. Bhosale and S. -S. Li, “Multi-harmonic phononic frequency comb generation in capacitive CMOS-MEMS resonators,”Applied Physics Letters, vol. 124, no. 16, Apr. 2024.

  2. Z. -W. Lin, C. -Y. Wu and S. -S. Li, “Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications,”Journal of Microelectromechanical Systems, vol. 33, no. 3, pp. 333-341, Mar. 2024.

  3. H. -Y. Chen, P. -I. Shih, W. R. Ali, M. -H. Li, S. -S. Li*, “Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers,”Journal of Microelectromechanical Systems,vol. 32, no. 5, pp. 461-473, Oct. 2023.

  4. J. Satija, S. Singh, A. A. Zope, S. -S. Li*, “An Aluminum Nitride Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer,”IEEE Sensors Journal,vol. 23, no. 15, pp. 16736-16745, 1 Aug.1, 2023.

  5. C.-Y. Chang, C.-C Yang, S. -S. Li*, “A Filter-Free Third Overtone Quartz Oscillator Based on Micromachining Technology,”IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,vol. 70, no. 6, pp. 577-584, June 2023.

  6. A. A. Zope, S. -S. Li*, “Design and analysis of CMOS-MEMS transducers,”Frontiers in Mechanical Engineering,vol.9, 2023.

  7. C,-Y Chang, S,-W Wang, S.-S. Li*, “Performance Enhancement of Piezoelectric Bulk Mode MEMS Mode-Matched Gyroscopes Based on Secondary Phase Feedback Loop,”Journal of Micromechanics and Microengineering (2023), Feb.2023.

  8. K. S. Bhosale, A. A. Zope, G. Pillai, S.-S. Li*, “Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability,”Journal of Microelectromechanical Systems, vol. 32, no. 2, pp. 173-183, Jan. 2023.

  9. C,-Y Liu, S.-S. Li*, “Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators,”Scientific Reports,12, 21339 (2022), Dec.2022.

  10. S. Bhattacharya, J. Satija, S. Trivedi, S.-S. Li*, “Sensitivity Enhancement of Thermal Piezoresistive Resonant MEMS Sensors Using Mechanical Coupling and DC Tuning,”Journal of Microelectromechanical Systems, vol. 31, no. 5, pp. 760-770, July.2022.

  11. K. S. Sharma, H,-T. Jen, S.-S. Li, G. Pillai*, “Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator,”Journal of Micromechanics and Microengineering, vol. 32, no. 8, July.2022.

  12. A. A. Zope and S.-S. Li*, “CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors,” Frontiers in Mechanical Engineering, vol. 8, pp. 2297-3079, June.2022.

  13. A. R. Tripathy, C. Chang, S. Gupta, A. K. Anbalagan, C.-H. Lee, S.-S. Li, and N.-H. Tai*, “Polyethylenimine/Nitrogen-Doped Reduced Graphene Oxide/ZnO Nanorod Layered Composites for Carbon Dioxide Sensing at Room Temperature,” ACS Appl. Nano Mater., 2022, 5, 5, pp. 6543–6554, May.2022.

  14. S. Bhattacharya, N.-Y. Teng, J. Satija, C.-T. Lin and S.-S. Li*, “Detection of Polystyrene Beads Concentration Using an SOI-MEMS Differential Rotational Thermal Piezoresistive Resonator for Future Label-Free Biosensing Applications,” IEEE Sensors Journal, vol. 21, no. 19, pp. 21400-21409, Oct. 2021.

  15. S. Trivedi, T. Shen, C.-Y. Chang, P.-W. Huang and S.-S. Li*, “Design of Piezoelectric MEMS Accelerometer Module and its Application in Surface Roughness Prediction of Fused Silica Substrate,” IEEE Sensors Journal, vol. 21, no. 19, pp. 21979-21988, Oct. 2021.

  16. G. Pillai and S.-S. Li*, “Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 30, no. 5, pp. 696-702, Oct. 2021.

  17. H.-Y. Chen, S.-S. Li and M.-H. Li, “ A Low Impedance CMOS-MEMS Capacitive Resonator Based on Metal-Insulator-Metal (MIM) Capacitor Structure,” IEEE Electron Device Letters (EDL), vol. 42, no. 7, pp. 1045-1048, July 2021.

  18. G. Pillai and S.-S. Li*, “Piezoelectric MEMS resonators: A review,” IEEE Sensors Journal, vol. 21, no. 11, pp. 12589-12605, June, 2021.

  19. G. Pillai and S.-S. Li*, “Controllable multichannel acousto-optic modulator and frequency synthesizer enabled by nonlinear MEMS resonator,” Scientific Reports, vol. 11, 10898, May 2021.

  20. H.-T. Jen, G. Pillai, S.-I. Liu, and S.-S. Li*, “High-Q support transducer MEMS resonators enabled low phase noise oscillators,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 68, no. 4, pp. 1387-1398, April 2021.

  21. A. A. Zope and S.-S. Li*, “Balanced drive and sense CMOS thermal piezoresistive resonators and oscillators,” IEEE Electron Device Letters (EDL), vol. 42, no. 2, pp. 232-235, Feb. 2021.

  22. C. Weng, G. Pillai, and S.-S. Li*, “A PM2.5 Sensor Module Based on a TPoS MEMS Oscillator and an Aerosol Impactor,” IEEE Sensors Journal, vol. 20, no. 24, pp. 14722-14731, Dec. 2020.

  23. G. Pillai, and S.-S. Li*, “Quality factor boosting of Bulk acoustic wave resonator based on a two dimensional array of high Q resonant tanks,” Applied Physics Letters (APL), vol. 116, no. 16, pp. 163502, Apr. 2020.

  24. C.-H. Weng, G. Pillai, and S.-S. Li*, “A thin-film piezoelectric-on-silicon MEMS oscillator for mass sensing applications,” IEEE Sensors Journal, vol. 20, no. 13, pp. 7001-7009, Jul. 2020.

  25. A. A. Zope, J. Chang, T. Liu and S.-S. Li*, “A CMOS-MEMS Thermal-Piezoresistive Oscillator for Mass Sensing Applications,” IEEE Transactions on Electron Devices, vol. 67, no. 3, pp. 1183-1191, Mar. 2020.

  26. J. Satija, S. Dey, S. Bhattacharya, G. Pillai and S.-S. Li*, “A chip-scale frequency down-conversion realized by MEMS-based filter and local oscillator,” Sensors and Actuators A: Physical, vol. 302, pp. 111787, Feb. 2020.

  27. M.-H. Li, W. Chiu, C. Chou, G. Pillai and S.-S. Li*, “Conceptual Design of a Resonant Pirani Gauge (RPG) Towards Wide Range Pressure Sensing,” IEEE Sensors Letters, vol. 3, no. 11, pp. 1-4, Art. no. 2501804, Nov. 2019.

  28. C.-Y. Chen, M.-H. Li, A. A. Zope, and S.-S. Li*, “A CMOS-integrated MEMS platform for frequency stable resonators - Part I: Fabrication, implementation and characterization,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 28, no. 5, pp. 744-754, Oct. 2019.

  29. C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li*, “A CMOS-integrated MEMS platform for frequency stable resonators - Part II: Design and analysis,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 28, no. 5, pp. 755-765, Oct. 2019.

  30. S. Bhattacharya and S. Li*, “A fully differential SOI-MEMS thermal piezoresistive ring oscillator in liquid environment intended for mass sensing,” IEEE Sensors Journal, vol. 19, no. 17, pp. 7261-7268, 1 Sept.1, 2019.

  31. G. Pillai, A. A. Zope, and S.-S. Li*, “Piezoelectric based support transducer design to enable high performance bulk mode resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 28, no. 1, pp. 4-19, Feb. 2019.

  32. M.-H. Li, C.-Y. Chen, and S.-S. Li*, “A study on the design parameters for MEMS oscillators incorporating nonlinearities,” IEEE Transactions on Circuits and Systems I (TCAS-I), vol. 65, no. 10, pp. 3424-3434, Oct. 2018.

  33. F. Mohammadi and S.-S. Li*, “Copper like thermal conductivity and silicon like coefficient of thermal expansion copper graphene for high power IGBT by metal injection molding,” Materials Transactions, vol. 59, no. 11, pp. 1677-1683, August 2018.

  34. F. Mohammadi, N. Arab, and S.-S. Li*, “Metal injected copper carbon nanotube composite material with high thermal conductivity and low CTE for IGBT power modules,” Materials Transactions, vol. 59, no. 8, pp. 1251-1258, August 2018.

  35. C.-Y. Chen, M.-H. Li, and S.-S. Li, “CMOS-MEMS resonators and oscillators : a review,” Special Issue on Open Collaboration for MEMS, Sensors and Materials, vol. 30, no. 4, pp. 733-756, April 2018. (Invited Review Paper).

  36. C.-C. Chu, S. Dey, T.-Y. Liu, C.-C. Chen, and S.-S. Li, “Thermal-piezoresistive SOI-MEMS oscillators based on a fully-differential mechanically coupled resonator array for mass sensing applications,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 27, no. 1, pp. 59-72, Feb. 2018.

  37. G. Pillai, A. A. Zope, J. M.-L. Tsai, and S.-S. Li, “Design and Optimization of SHF Composite FBAR Resonators,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 64, no. 12, pp. 1864-1873, Dec. 2017.

  38. M.-H. Li, C.-Y. Chen, C.-Y. Liu, and S.-S. Li, “A sub-150µW BEOL-embedded CMOS-MEMS oscillator with a 138dBΩ ultra-low-noise TIA,” IEEE Electron Device Letters (EDL), vol. 37, no. 5, pp. 648-651, May 2016.
  39. C.-Y. Chen, M.-H. Li, C.-H. Chin, and S.-S. Li, “Implementation of a CMOS-MEMS filter through a mixed electrical and mechanical coupling scheme,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 2, pp. 262-274, April 2016.
  40. T. L. Naing, T. Rocheleau, Z. Ren, S.-S. Li, and C. T.-C. Nguyen, “High-Q UHF spoke-supported ring resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 1, pp. 11-29, Feb. 2016.
  41. C.-H. Chin, M.-H. Li, C.-Y. Chen, Y.-L. Wang, and S.-S. Li, “A CMOS-MEMS arrayed RGFET oscillator,” J. Micromech. Microeng. (JMM), vol. 25, pp. 115025, Oct. 2015. (Highlights of 2015)
  42. M.-H. Li, C.-Y. Chen, W.-C. Chen, and S.-S. Li, “A vertically-coupled MEMS resonator pair for oscillator applications,” IEEE / ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 3 pp. 528-530, June 2015.
  43. S. Wang, B. Bahr, W.-C. Chen, W. Fang, S.-S. Li, and D. Weinstein, “Temperature coefficient of frequency modeling for CMOS-MEMS bulk mode composite resonator,”IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), . 62, no. 6, pp. 1166-1178, June 2015.
  44. C.-S. Li, M.-H. Li, C.-C. Chen, C.-H. Chin, and S.-S. Li, “A low voltage CMOS-MicroElectroMechanical Systems thermal-piezoresistive resonator with Q > 10,000,” IEEE Electron Device Letters (EDL), vol. 36, no. 2, pp. 192-194, 2015.
  45. J.-Y. Fang, C.-H. Chu, I. Sarang, K.-C. Fang, C.-P. Hsu, Y.-F. Huang, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, Y.-L. Wang, “Electronic hydroxyl radical microsensors based on the conductivity change of polyaniline,”Sensors and Actuators B: Chemical, vol. 208, pp. 99-105, 2015.
  46. C.-S. Li, M.-H. Li, and S.-S. Li, “ Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100nm gaps,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 62, no. 1, pp. 220-229, 2015.
  47. M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Design and characterization of a dual-mode CMOS-MEMS resonator for TCF manipulation,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2, pp. 446-457, April 2015.
  48. M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2 pp. 360-372, April 2015.
  49. K.-C. Fang, C.-H. Chu, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Cost-effective and highly sensitive cholesterol microsensors with fast response based on the enzyme-induced conductivity change of polyaniline,” Applied Physics Letters (APL), vol. 105, pp. 113304, 2014.
  50. C.-H. Chin, C.-S. Li, M.-H. Li, Y.-L. Wang, S.-S. Li, “Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor,” J. Micromech. Microeng. (JMM), vol.24, no.9, pp. 095005, 2014.
  51. C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically coupled CMOS-MEMSfilters for channel-select applications,”Sensors and Actuators A: Physical, vol. 216, pp. 394- 404, 2014.
  52. K.-C. Fang, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-C. Huang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Realization of an ultra-sensitive hydrogen peroxide sensor with conductance change of horseradish peroxidase-immobilized polyaniline and investigation of the sensing mechanism,” Biosensors and Bioelectronics, vol. 55, pp. 294-300, 2014.
  53. Y.-R. Hsu, Y.-W. Kang, J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-k. Chang, C.-C. Huang, C.-P. Hsu, T.-h. Huang, Y.-F. Huang, Y.-C. Sun, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “Investigation of C-terminal domain of SARS nucleocapsid protein–Duplex DNA interaction using transistors and binding-site models,” Sensors and Actuators B: Chemical, vol. 193, pp. 334- 339, 2014.
  54. J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-P. Hsu, Y.-W. Kang, K.-C. Fang, W.-L. Kao, D.-J. Yao, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J.-A. Yeh, F. Ren, and Y.-L. Wang, “Viscosity-dependent drain current noise of AlGaN/GaN high electron mobility transistor in polar liquids,” J. Appl. Phys., vol. 114, 204503, 2013.
  55. C.-S. Li, M.-H. Li, C.-H. Chin, and S.-S. Li, “Differentially piezoresistive sensing for CMOS-MEMS resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 6, pp. 1361-1372, Dec. 2013.
  56. Y.-C. Liu, M.-H. Tsai, W.-C. Chen, M.-H. Li, S.-S. Li, and W. Fang, “Temperature-compensated CMOS-MEMS oxide resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 5, pp. 1054-1065, Oct. 2013.
  57. S.-S. Li and C.-M. Cheng, “Analogy among microfluidics, micromechanics, and microelectronics,” Lab on a Chip, vol. 13, pp. 3782-3788, July, 2013.
  58. V. Pachkawade, M.-H. Li, C. S. Li, and S.-S. Li, “A CMOS-MEMS resonator integrated system for oscillator application,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2882-2889, Aug. 2013.
  59. C.-C. Huang, G.-Y. Lee, J.-I. Chyi, H.-T. Cheng, C.-P. Hsu, Y.-R. Hsu, C.-H. Hsu, Y.-F. Huang, Y.-C. Sun, C.-C. Chen, S,-S, Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “AlGaN/GaN high electron mobility transistors for protein–peptide binding affinity study,” Biosensors and Bioelectronics, vol. 41, pp. 717-722, March 2013.
  60. M.-H. Li, W.-C. Chen, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators,” IEEE Sensors Journal, vol. 12, no. 12, pp. 3399-3407, Dec. 2012.
  61. Y.-C. Lee, M.-H. Li, Y. T. Cheng, W. Hsu, and S.-S. Li, “Electroplated Ni-CNT nanocomposite for micromechanical resonator applications,” IEEE Electron Device Letters (EDL), vol. 33, no. 6, pp. 872-874, June 2012.
  62. W.-C. Chen, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps and quasi-linear frequency tuning,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 21, no. 3, pp. 688-701, June 2012.
  63. W.-C. Chen, M.-H. Li, Y.-C. Liu, W. Fang, and S.-S. Li, “A fully-differential CMOS-MEMS DETF oxide resonator with Q > 4,800 and Positive TCF,” IEEE Electron Device Letters (EDL), vol. 33, no. 5, pp. 721-723, May 2012.
  64. L.-J. Hou and S.-S. Li, “High-stiffness driven micromechanical resonators with enhanced power handling,” Applied Physics Letters (APL), vol. 100, no. 13, pp. 131908, 2012. (Selected for the issue of Virtual Journal of Nanoscale Science & Technology)
  65. M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 59, no. 3, pp. 346-357, March 2012.
  66. C.-S. Li, L.-J. Hou, and S.-S. Li, “Advanced CMOS-MEMS resonator platform,” IEEE Electron Device Letters (EDL), vol. 33, no. 2, pp. 272-274, Feb. 2012.
  67. W.-C. Chen, W. Fang, and S.-S. Li, “A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits,” J. Micromech. Microeng. (JMM), vol. 21, no. 6, pp. 065012, May 2011.
  68. C.-H. Chin, T.-F. Lu, J.-C. Wang, J.-H. Yang, C.-E. Lue, C.-M. Yang, S.-S. Li, and C.-S. Lai, “Effects of CF4 Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2 Layer Grown by Atomic Layer Deposition,” Japanese Journal of Applied Physics (JJAP), vol. 50, no. 4, pp. 04DL06-1-5, April 2011.
  69. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “1.52-GHz micromechanical extensional wine-glass mode ring resonators,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 55, no. 4, pp. 890-907, April 2008.
  70. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “Series-resonant VHF micromechanical resonator reference oscillators,” IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.

Conference Papers

  1. P.-C. Chen, Y.-C. Lin, H.-Y. Chen, S.-S. Li and M.-H. Li, "A Bipolar-Biased Differential CMOS-MEMS CMUT ,” 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, 2024, pp. 951-954.
  2. Z.-W. Lin, C.-Y. Chang and S.-S. Li, "An Effective Frequency Tuning Mechanism for Piezoelectric MEMS Oscillators ,” 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, 2024, pp. 1063-1066.
  3. A.A. Zope, K.S. Bhosale and S.-S. Li, "Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing ,” 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, 2024, pp. 561-564.
  4. C.-Y. Chang, P.-C. Hsieh, C.-W. Yao, C.-C. Yang and S.-S. Li, "A Selective Overtone MEMS-based Quartz Oscillator with Low Acceleration Sensitivity ,” 2023 International Electron Devices Meeting (IEDM), San Francisco, CA, USA, 2023.
  5. P.-C. Lo, W. Lin, and S.-S. Li, "A Low Phase Noise Piezoelectric MEMS Oscillator with Low Power Consumption ,” 2023 International Electron Devices Meeting (IEDM), San Francisco, CA, USA, 2023.
  6. Z.-Q. Lee, J.-S. Jiang, H.-Y. Chen, S.-S. Li, and M.-H. Li, "An intrinsically temperature-compensated fully differential CMOS-MEMS resonator with dual-resistor piezoresistive detection,” in Proc., Kyoto, Japan, June 25-29, 2023, pp. 577-580.(Outstanding Young Researcher Paper Competition Finalist)
  7. W. Lin and S.-S. Li, "Investigation of quality factor variation based on tailored mode shape engineering for piezoelectric contour mode resonators,” in Proc., Kyoto, Japan, June 25-29, 2023.
  8. K.-W. Tang, A. A. Zope, Z.-W. Lin, G. Pillai, and S.-S. Li, "A mechanically coupled piezoelectric MEMS filter based on support transducer topology,” in Proc., Kyoto, Japan, June 25-29, 2023.
  9. H.-Y. Chen, Y.-S. Chan, T.-H. Hsu, M.-H. Li, and S.-S. Li, "A single-chip CMOS-MEMS CMUT array transceiver with low bias,” in Proc., Kyoto, Japan, June 25-29, 2023, pp. 136-139. (Outstanding Young Researcher Paper Competition Winner, 1% Selection Rate)
  10. C.-Y. Chang, C.-Y. Liu and S.-S. Li, "A Self-Sustained Phononic Comb MEMS Oscillator with Loop Phase Tuning,” 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), Toyama, Japan, 2023, pp. 1-3.
  11. W. Fang, S.-S. Li and M.-H. Li, "Leveraging Semiconductor Ecosystems to MEMS,” 2023 IEEE, 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023.
  12. H.-Y. Chen, M.-H. Li and S.-S. Li, "A New Finding on Nonlinear Damping and Stiffness of Flexural Mode Capacitive MEMS Resonators,” 2023 IEEE, 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, pp. 526-529.
  13. C.-Y. Wu, Z.-W. Lin and S.-S. Li, "A Novel Feedthrough Cancellation Technique for Piezoelectric MEMS Resonant Sensors in Ionic Liquid Medium,” 2023 IEEE, 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, pp. 905-908.
  14. C.-Y. Liu, C.-Y. Chang and S.-S. Li, "Breaking the Dead Zone Limitation of Pmuts Based on a Phase Shift of Driving Waveform with Window Function,” 2023 IEEE, 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, pp. 953-956.
  15. C.-Y. Chang, G. Pillai, and S.-S. Li, "Phase noise optimization of piezoelectric bulk mode mems oscillators based on phase feedback in secondary loop,” 2022 IEEE, 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 212-215.
  16. H.-Y. Chen, P.-I. Shih, M.-H. Li, and S.-S. Li, "5v-bias CMOS-MEMS capacitive resonator with RM < 5kΩ based on metal-insulator-metal (MIM) capacitor,” 2022 IEEE, 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 1042-1045.
  17. J. Satija, P.-W. Huang, S. Singh, T. Shen, H.-Y. Chen, and S.-S Li, "Development of rolling bearing health diagnosis and prediction system using MEMS accelerometer vibration sensing module,” 2022 IEEE, 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 446-449.
  18. C.-Y. Chang, S.-S. Li et al., "Study on the Spurious Modes in FBAR Resonators with Quasi-Free Edges,” in Proc., 2022 Joint Conf. of Eur. Freq. Time Forum - IEEE Int. Freq. Contr. Symp. (EFTF-IFCS’22), 2022.(Accept)
  19. C.-Y. Chang, G. Pillai, and S.-S. Li, "A Semi-Analytical Modeling of Coupled Piezoelectric Resonators Based on Support Transducer Topology,” Tech. Digest, 2022 Hilton Head MEMS Conf., 2022.(Accept)
  20. K. -W. Tang, P. -C. Cheng, S. Trivedi and S. -S. Li, "Design and Characterization of an ALN Piezoelectric Mems Magnetometer,” Tech. Dig., 21st Int. Conf. on Solid-State Sensors & Actuators (Transducers’21), Virtual Conference, June 20-25, 2021, pp. 414-417.
  21. Z. -W. Lin, K. Bhosale and S. -S. Li, "A CMOS-MEMS Thermal-Piezoresistive Oscillator Implemented for Wide-Range Pressure Sensing Applications ,” Tech. Dig., 21st Int. Conf. on Solid-State Sensors & Actuators (Transducers’21), Virtual Conference, June 20-25, 2021, pp. 74-77.
  22. C.-H. Weng, G. Pillai, and S.-S. Li, "A mass sensor based on an aluminum nitride MEMS oscillator for gas sensing applications ,” Tech. Dig., 21st Int. Conf. on Solid-State Sensors & Actuators (Transducers’21), Virtual Conference, June 20-25, 2021, pp. 1287-1290
  23. C. -H. Weng, C.-Y. Wu, G. Pillai, and S. -S. Li, "A Miniaturized PM2.5 Sensor Module Based on a Thin-Film Piezoelectric-on-Silicon MEMS Oscillator ,” 2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2021, pp. 1-4.
  24. N. M. Nguyen, C.-Y. Chang, G. Pillai, and S.-S. Li, "Design of piezoelectric MEMS bulk acoustic wave mode-matched gyroscopes based on support transducer,” (oral presentation) in the 34th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’21), Jan. 25-29, 2021, pp. 338-341.
  25. K. Bhosale, C.-Y. Chen, M.-H. Li, and S.-S. Li, "Standard CMOS integrated ultra-compact micromechanical oscillating active pixel arrays,” (oral presentation) in the 34th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’21), Jan. 25-29, 2021, pp. 157-160.
  26. S. Bhattacharya, J. Satija, S. Trivedi and S.-S. Li, "A novel thermal piezoresistive coupled resonator implementing mode localization for mass sensing,” Proceedings, IEEE Sensors Conference, Rotterdam, Netherland, October 25-28, 2020, pp. 1-4.
  27. S. Trivedi, Ranjith HG, T. Shen, P.W. Huang, and S.-S. Li, "Piezoelectric MEMS vibration sensor module for machining quality prediction,” Proceedings, IEEE Sensors Conference, Rotterdam, Netherland, October 25-28, 2020, pp. 1-4.
  28. T.-H. Hsu, A. A. Zope, M.-H. Li, and S.-S. Li, "A compact monolithic CMUT receiver front-end in a TiN-C CMOS-MEMS platform,” Proceedings, IEEE International Ultrasonics Symposium (IUS), Las Vegas, NV, USA, 2020, Sept. 6-11, 2020, pp. 1-4.
  29. H. -T. Jen, G. Pillai, S. L. Liu, and S. S. Li, "Low phase noise wine-glass oscillator realized using enhanced support transducer design,” Proceedings, the 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), Keystone, CO, USA, Jul. 19-23, 2020, pp. 1-3.
    (Best paper award finalist)
  30. T.-H. Hsu, M.-H. Li, A. A. Zope, and S.-S. Li, "A sub-mW/pixel zero-bias CMUT-in-CMOS receiver front-end with TiN electrode,” Proceedings, the 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), Keystone, CO, USA, Jul. 19-23, 2020, pp. 1-4.
    (Best paper award finalist)
  31. K. Bhosale, G. Pillai, and S. -S. Li, "Nonlinearity driven higher order harmonics in CMOS-MEMS resonators,” Proceedings, Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), Keystone, CO, USA, Jul. 19-23, 2020, pp. 1-3.
  32. K. Tseng, M. Li, and S. Li, "A monolithic tri-axis MEMS gyroscope operating in air,” Proceedings, IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) 2020, Hiroshima, Japan, 11th May 2020, pp. 1-3.
  33. S.-S. Li and Shyam Trivedi, "CMOS-MEMS resonant transducers for frequency control and sensing,” Proceedings, 33rd IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’20), Vancouver, BC, Canada, Jan. 18-22, 2020, pp. 176-181.
  34. C.-Y. Liu, G. Pillai, and S.-S. Li, "Exploring the parametric energy transfer in a multi-mode piezoelectric resonator with nonlinear harmonics,” Proceedings, 33rd IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’20), Vancouver, BC, Canada, Jan. 18-22, 2020, pp. 1187-1190.
  35. C.-Y. Chen, A. A. Zope, M.-H. Li, and S.-S. Li, "A generic TiN-C process for CMOS FEOL/BEOL-embedded vertically-coupled capacitive and piezoresistive resonators,” Proceedings, 20th Int. Conf. on Solid-State Sensors & Actuators (Transducers’19), Berlin, Germany, June 23-27, 2019, pp. 531-534.
  36. G. Pillai, M.-F. Lai, and S.-S. Li, "A fully differential thin film piezo on silicon flexural mode ring resonator with exceptional quality factor,” Proceedings, 20th Int. Conf. on Solid-State Sensors & Actuators (Transducers’19), Berlin, Germany, June 23-27, 2019, pp. 889-892.
  37. C.-Y. Chen, M.-H. Li, A. Gao, R. Lu, S.-S. Li, and S. Gong, "Q-enhanced lithium niobate SH0 resonators with optimized acoustic boundaries,” Proceedings, 2019 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Orlando, Florida, April 14-18, 2019, pp. 1-4.
  38. G. Pillai, C.-Y. Chen, and S.-S. Li, "Support transducer enabled single-resonator channel-select filters,” Proceedings, 2019 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Orlando, Florida, April 14-18, 2019, pp. 1-2.
  39. J.-R. Guo, A. A. Zope, C.-Y. Chen, M.-H. Li, M.-F. Lai, and S.-S. Li, "A fully-differential CMOS-MEMS DETF resonator design with extended mass and electrodes to enable high power handling,” Proceedings, 32st IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’19), Seoul, Korea, Jan. 27-31, 2019, pp. 903-906.
  40. C.-A. Sung, T.-Y. Liu, A. A. Zope, M.-H. Li, and S.-S. Li, "Interface circuit design to enable miniaturization of thermal-piezoresistive oscillators for mass sensing applications,” Proceedings, 32st IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’19), Seoul, Korea, Jan. 27-31, 2019, pp. 899-902.
  41. K.-J. Tseng, Y.-H. Huang, M.-H. Li, and S.-S. Li, "Design of a 3-axis MEMS gyroscope based on a fully differential operation,” Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT), Hong Kong, June 24-27, 2018.
  42. Ranjith HG, J.-R. Guo, M. Lin, S.-S. Li, J. Tseng, and E. Wu, "Reduction in the effect of the timing Jitter in piezoelectric acceleration system by oversampling technique,” Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT), Hong Kong, June 24-27, 2018.
  43. T.-H. Hsu, C.-Y. Chen, C.-Y. Liu, M.-H. Li, and S.-S. Li, "A 200-nm-gap titanium nitride composite CMOS-MEMS CMUT for biomedical ultrasounds,” Proceedings, 2018 IEEE Frequency Control Symposium, Olympic Valley, CA, May 21-24, 2018, pp. 468-470.
  44. G. Pillai, A. A. Zope, and S.-S. Li, "Piezoelectrically transduced Lamé-mode resonators and oscillators,” Proceedings, 2018 IEEE Frequency Control Symposium, Olympic Valley, CA, May 21-24, 2018, pp. 324-325.
  45. G. Pillai, A. A. Zope, and S.-S. Li, "A novel transducer design to enable high-performance piezoelectric MEMS resonators and oscillators,” Proceedings, 31st IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’18), Belfast, Northern Ireland, Jan. 21-25, 2018, pp. 166-169.
  46. T.-Y. Liu, C.-A. Sung, C.-H. Weng, C.-C. Chu, A. A. Zope, G. Pillai, and S.-S. Li, "Gated CMOS-MEMS thermal-piezoresistive oscillator-based PM2.5 sensor with enhanced particle collection efficiency,” Proceedings, 31st IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’18), Belfast, Northern Ireland, Jan. 21-25, 2018, pp. 75-78.
  47. G. Fang, G. Pillai, M.-H. Li, C.-Y. Liu, and S.-S. Li, "A VHF temperature compensated lithium niobate-on-oxide resonator with Q > 3900 for low phase noise oscillators,” Proceedings, 31st IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’18), Belfast, Northern Ireland, Jan. 21-25, 2018, pp. 723-726.
  48. G. Pillai, A. A. Zope, J. M.-L. Tsai, and S.-S. Li, "An apodized 3-GHz thin film piezoelectric on substrate FBAR,” Proceedings, 2017 European Frequency and Time Forum & International Frequency Control Symposium (EFTF-IFCS’17), Besançon, France, July 10-13, 2017, pp. 551-553.
  49. T.-Y. Liu, C.-C. Chu, M.-H. Li, C.-Y. Liu, C.-Y. Lo, and S.-S. Li, "CMOS-MEMS thermal-piezoresistive oscillators with high transduction efficiency for mass sensing applications,” Tech. Dig., 19th Int. Conf. on Solid-State Sensors & Actuators (Transducers’17), Kaohsiung, Taiwan, June 18-22, 2017, pp. 452-455. (Best Oral Paper Award).
  50. C.-Y. Chou, M.-H. Li, C.-Y. Chen, C.-Y. Liu, and S.-S. Li, "An innovative 3-D mechanically-coupled array design for MEMS resonators and oscillators,” Tech. Dig., 19th Int. Conf. on Solid-State Sensors & Actuators (Transducers’17), Kaohsiung, Taiwan, June 18-22, 2017, pp. 90-93.
  51. C. Y. Chen, M. H. Li, G. Pillai, J. M. L. Tsai and S. S. Li, "An innovative piezo-MEMS channel-select filter design based on non-monotonic coupled modes,” Proceedings, 30th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’17), Las Vegas, NV, Jan. 22-26, 2017, pp. 950-953.
  52. A. A. Zope, Ranjith HG, J.-H. Chang, C.-C. Chen, D.-J. Yao, and S.-S. Li, "An effective temperature compensation algorithm for CMOS-MEMS thermal-piezoresistive oscillators with sub ppm/ºC thermal stability,” Proceedings, 30th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’17), Las Vegas, NV, Jan. 22-26, 2017, pp. 885-888.
  53. C.-C. Chu, T.-Y. Liu, T.-M. Chen, C.-H. Weng, W.-T. Hsu, and S.-S. Li, "A miniaturized aerosol sensor implemented by a silicon-based MEMS thermal-piezoresistive oscillator,” Proceedings, 30th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’17), Las Vegas, NV, Jan. 22-26, 2017, pp. 1216-1219.
  54. C.-Y. Liu, M.-H. Li, Ranjith HG, C.-Y. Chen, and S.-S. Li, "A 1 MHz 4 ppm CMOS-MEMS oscillator with built-in self-test and sub-mW ovenization power,” Technical Digest, 2016 IEEE International Electron Devices Meeting (IEDM’16), San Francisco, CA, Dec 3-7, 2016. pp. 26.7.1-26.7.4.
  55. S.-S. Li, "A key more-than-Moore technology: CMOS-MEMS resonant transducers,” Proceedings, 16th International Conference on Nanotechnology (IEEE Nano 2016), Sendai, Japan, Aug 22-25, 2016, pp. 456-459. (Invited)
  56. M.-H. Li, C.-Y. Liu, C.-Y. Chen, and S.-S. Li, "An 8V 50µW 1.2MHz CMOS-MEMS oscillator,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
  57. G. Pillai, A.-A. Zope, J. M.-L. Tsai, and S.-S. Li, "3-GHz BAW composite resonators integrated with CMOS in a single-chip configuration,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
  58. W.-C. Chiu, M.-H. Li, C.-Y. Chou, and S.-S. Li, "A ring-down technique implemented in CMOS-MEMS resonator circuits for wide-range pressure sensing applications,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
  59. C.-Y. Liu, M.-H. Li, C.-Y. Chen, and S.-S. Li, "An ovenized CMOS-MEMS oscillator with isothermal resonator and sub-mW heating power,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
  60. W.-S. Tan, W. G. Fang, G. Pillai, C.-C. Chen, C.-Y. Chen, C.-H. Chin, and S.-S. Li, "Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April.
  61. G. Pillai, W.-S. Tan, C.-C. Chen, and S.-S. Li, "Modeling of zero TCF and maximum bandwidth orientation for lithium tantalate RF MEMS resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April.
  62. E.-C. Chang, C.-C. Chen, and S.-S. Li, "Real-time mass sensing and dynamic impact monitoring of printed pico-liter droplets realized by a thermal-piezoresistive self-sustained oscillator,” Proceedings, 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 1078-1081.
  63. F.-Y. Lee, K.-C. Liang, E. Cheng, S.-S. Li, and W. Fang, "Acceleration-insensitive fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope with 1°/hr bias instability,” Proceedings , 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 946-949.
  64. M.-H. Li, C.-Y. Chen, and S.-S. Li, "A reliable CMOS-MEMS platform for titanium nitride composite (TiN-C) resonant transducers with enhanced electrostatic transduction and frequency stability,” Tech. Dig., 2015 IEEE International Electron Devices Meeting (IEDM’15), Washington, DC, Dec. 7-9, 2015, pp. 487-490.
  65. H.-C. Su, M.-H. Li, and S.-S. Li, "A single-chip oscillator based on a deep-submicron gap CMOS-MEMS resonator array with high-stiffness driving scheme,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 133-136.
  66. C.-Y. Chen, M.-H. Li, and S.-S. Li, "Transduction comparison of a resonant transducer realized in a commercially available CMOS-MEMS platform,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 145-148.
  67. J. Ren, C.-Y. Liu, and S.-S. Li, "A mode-matching 130-kHz ring-coupled gyroscope with 225 ppm initial driving / sensing mode frequency splitting,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1057-1060.
  68. C.-Y. Chen, M.-H. Li, and S.-S. Li, "Statistical characterization of a CMOS-MEMS resonator for monolithic ovenized oscillator applications,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1965-1968..
  69. J.-H. Chang, C.-S. Li, C.-C. Chen, and S.-S. Li, "Performance evaluation of CMOS-MEMS thermal-piezoresistive resonators in ambient pressure for sensor applications,” Proceedings, 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 202-204.
  70. W.-C. Chiu, M.-H. Li, C.-Y. Chen, and S.-S. Li, "Effects of pressure and bias voltage on the phase noise of CMOS-MEMS oscillators,” Proceedings, 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 155-157.
  71. C.-H. Chin, C.-S. Li, M.-H. Li, and S.-S. Li, "A CMOS-MEMS arrayed RGFET oscillator using a band-to-band tunneling bias scheme,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 988-991.
  72. M.-H. Li, C.-S. Li, and S.-S. Li, “Exploring the Q-factor limit of temperature compensated CMOS-MEMS resonators,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 853-856.
  73. M.-H. Li, C.-Y. Chen, C.-H. Chin, C.-S. Li, and S.-S. Li, “Optimizing the close-to-carrier phase noise of monolithic CMOS-MEMS oscillators using bias-dependent nonlinearity,” Dig. of Tech. Papers, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 558-561.
  74. K.-H. Li, C.-C. Chen, M.-H. Li, and S.-S. Li, “A self-sustained nanomechanical thermal-piezoresistive oscillator with ultra-low power consumption,” Dig. of Tech. Papers, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 554-557.
  75. Y.-J. Liao, T.-W. Kuo, and S.-S. Li, “Design and characterization of CMOS-MEMS capacitive micromachined ultrasonic transducers,” Proceeding, 8th Int. Conf. on Nano/Molecular Medicine and Engineering (IEEE-NanoMed), Kaohsiung, Taiwan, Nov. 9-12, 2014.
  76. C.-H. Chin and S.-S. Li, “A CMOS-MEMS Arrayed RGFET,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 325-326.
  77. M.-H. Li, C.-Y. Chen, and S.-S. Li, “An Experimental Investigation on the Q-Boosted CMOS-MEMS Flexural-Mode Resonator Circuits,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 327-328.
  78. C.-S. Li*. J. Lee*, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, Philip, X.-L. Feng “Multimode Characteristics of High-Frequency CMOS-MEMS Resonators,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 478-480. (*Co-first authors)
  79. C.-S. Li*, J. Lee*, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, Philip, X.-L. Feng “Exploring Parametric Resonance Effects in Bulk-Mode CMOS-MEMS Resonators,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 329-331. (*Co-first authors)
  80. C.-Y. Chen, M.-H. Li, C.-H. Chin, C.-S. Li, and S.-S. Li, “Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters,” Proceedings, 27th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’14), San Francisco, CA, Jan. 26-30, 2014, pp.1249-1252.
  81. M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, C.-C. Chen, and S.-S. Li, “Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators,” Dig. of Tech. Papers, the 2013 IEEE International Electron Devices Meeting (IEDM’13), Washington, DC, Dec. 9-11, 2013, pp. 475-478.
  82. S.-S. Li, “CMOS-MEMS resonators and their applications,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 915-921. (Invited)
  83. M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 539-542.
  84. C.-S. Li, M.-H. Li, C.-H. Chin, C.-Y. Chen, P. X.-L. Feng, and S.-S. Li, “A piezoresistive CMOS-MEMS resonator with high Q and low TCf,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 425-428.
  85. W. Fang, S.-S. Li, C.-L. Cheng, C.-I. Chang, W.-C. Chen, Y.-C. Liu, M.-H. Tsai, and C. Sun, “CMOS MEMS: A key technology towards the “More than Moore” era,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2513-2518. (Invited)
  86. C.-H. Chin, M.-H. Li, and S.-S. Li, “A CMOS-MEMS resonant-gate transistor,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2284-2287.
  87. C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters,”Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2288-2291.
  88. H. Zhu, C.-H. Chuang, C.-S. Li, M.-H. Li, J. E.-Y. Lee, and S.-S. Li, “The effects of tight capacitive coupling on phase noise performance: A LAMÉ-mode MEMS oscillaor study,”Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2304-2307.
  89. W.-C. Chen, M.-H. Li, Y.-C. Liu, D. Weinstein, W. Fang, and S.-S. Li, “Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2292-2295.
  90. Y.-C. Liu, M.-H. Tsai, S.-S. Li, and W. Fang, “A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 610-613.
  91. S.-S. Li, “Advances of CMOS-MEMS technology for resonator applications,” Proceedings, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS’13), Suzhou, China, April 7-10, 2013. (Invited)
  92. C.-C. Chen, H.-T. Yu, K.-H. Lee, and S.-S. Li, “Enhancement of temperature stability via constant structural-resistance control for MEMS resonators,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 765-768.
  93. M.-H. Li, C.-S. Li, C.-H. Chin, C.-Y. Chen, and S.-S. Li, “An ultra-low power ovenized CMOS-MEMS resonator monolithically integrated with interface circuits,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 753-756.
  94. T.-T. Chen, J.-C. Huang, Y.-C. Peng, C.-H. Chu, C.-H. Lin, E. Cheng, S.-S. Li, “A 17.6-MHz 2.5V ultra-low polarization voltage MEMS oscillator using an innovative high gain-bandwidth fully differential transimpedance voltage amplifier,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 741-744.
  95. V. Pachkawade, C.-S. Li, and S.-S. Li, “A Fully-Differential CMOS-MEMS Resonator Integrated with an On-Chip Amplifier,” Proceedings, 2012 IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
  96. H.-H. Lai, W.-C. Chen, and S.-S. Li, “A low-actuation voltage design for RF CMOS-MEMS switches,” Proceedings, 2012 IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
  97. C.-S. Li, M.-H. Li, and S.-S. Li, “Differential measurement of piezoresistive transduction for silicon-based MEMS resonators,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 1-4.
  98. C.-C. Chen, M.-H. Li, W.-C. Chen, H.-T. Yu, and S.-S. Li, “Thermally-actuated and piezoresistively-sensed CMOS-MEMS resonator array using differential-mode operation,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 1-4.
  99. W.-C. Chen, W. Fang, and S.-S. Li, “VHF CMOS-MEMS oxide resonators with Q > 10,000,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 1-4.
  100. M.-H. Li, C.-S. Li, L.-J. Hou, Y.-C. Liu, and S.-S. Li, “A 1.57mW 99dBW CMOS transimpedance amplifier for VHF micromechanical reference oscillators,” Proceedings, 2012 IEEE International Symposium on Circuits and Systems (ISCAS’12), Seoul, Korea, May 20-23, 2012, pp. 209-212.
  101. L.-J. Hou, C.-S. Li, and S.-S. Li, “High-stiffness-driven micromechanical resonator oscillator with enhanced phase noise performance,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 700-703.
  102. C.-S. Li, C.-H. Chin, and S.-S. Li, “Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 539-542.
  103. C.-C. Chen, H.-T. Yu, and S.-S. Li, “A balanced measurement and characterization technique for thermal-piezoresistive micromechanical resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 377-380.
  104. T.-H. Yen, M.-H. Tsai, C.-I Chang, Y.-C. Liu, S.-S. Li, R. Chen, and W. Fang, “Improvement of CMOS-MEMS accelerometer using the symmetric layers stacking design,” Proceedings, IEEE Sensors Conference, Limerick, Ireland, Oct. 28-31, 2011, pp. 145-148.
  105. N. Bhalla, S.-S. Li, and D. W.-Y. Chung, “Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk,” Proceedings, 2011 International Semiconductor Conference (CAS’11), Sinaia, Romania, Oct.17-19, 2011, pp. 353-356.
  106. C.-S. Li and S.-S. Li, “Capacitive gap-aspect-ratio enhancement using advanced CMOS process for CMOS-MEMS resonators,” Proceedings, 9th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’11), Hsinchu, Taiwan, June 12-18, 2011, pp. 47-48.
  107. Y.-C. Liu, M.-H. Tsai, W.-C. Chen, S.-S. Li, and W. Fang, “High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 934-937.
  108. M.-H. Li, W.-C. Chen, and S.-S. Li, “CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 1500-1503.
  109. M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration,” Proceedings, 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (IFCS’11), San Francisco, May 2-5, 2011, pp. 1-4.
  110. W.-C. Chen, W. Fang, and S.-S. Li, “Quasi-linear frequency tuning for CMOS-MEMS resonators,” Proceedings, 24th IEEE Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’11), Cancun, Mexico, January 23-27, 2011, pp.340-343.
  111. W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps,” Proceedings, 2010 IEEE Int. Frequency Control Symp. (IFCS’10), Newport Beach, California, June 2-4, 2010, pp. 340-343.
  112. W.-C. Chen, C.-S. Chen, K.-A. Wen, L.-S Fan, W. Fang, and S.-S. Li, “A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 204-207.
  113. W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 735-738.
  114. Y. Lin, W.-C. Li, I. Gurin, S.-S. Li, Y.-W. Lin, Z. Ren, B. Kim, and C. T.-C. Nguyen, “Digitally-Specified Micromechanical Displacement Amplifiers,” Dig. of Tech. Papers, the 15th Int. Conf. on Solid-State Sensors & Actuators (Transducers’09), Denver, Colorado, June 21-25, 2009, pp. 781-784.
  115. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “An MSI micromechanical differential disk-array filter,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 307-311.
  116. W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF nickel micromechanical spoke-supported ring resonators,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 323-326.
  117. Y.-W. Lin, Y. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Quality factor boosting via mechanically-coupled arraying,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 2453-2456.
  118. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “A micromechanical parallel-class disk-array filter,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361.
  119. L.-W. Hung, C. T.-C. Nguyen, Y. Xie, Y.-W. Lin, S.-S. Li, and Z. Ren, “UHF micromechanical compound-(2,4) mode ring resonators with solid-gap transducers,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375.
  120. S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Disk-array design for suppression of unwanted modes in micromechanical composite-array filters,” Proceedings, 19th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’06), Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869.
  121. Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Low phase noise array-composite micromechanical wine-glass disk oscillator,” Technical Digest, 2005 IEEE International Electron Devices Meeting (IEDM’05), Washington, DC, Dec. 5-7, 2005, pp. 287-290.
  122. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Small % bandwidth design of a 431-MHz notched-coupled micromechanical hollow-disk ring mixer-filter,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1295-1298.
  123. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Charge-based vibrating micromechanical resonators,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, 1596-1599.
  124. Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators," Proceedings, IEEE International Ultrasonics Symposium, Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1592-1595.
  125. S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, "Self-switching vibrating micromechanical filter bank," Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141. (student paper finalist award)
  126. Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive-transducer gaps," Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134. (best student paper award winner)
  127. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, "Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators," Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami Beach, Florida, Jan. 30-Feb. 3, 2005, pp. 219-222.
  128. M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, "Post-fabrication laser trimming of? micromechanical filters," Technical Digest, IEEE Int. Electron Devices Mtg., San Francisco, California, Dec. 13-15, 2004, pp. 32-49. (student paper finalist award)
  129. S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Bridged micromechanical filters," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.
  130. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine glass micromechanical disk reference oscillator," Digest of Technical Papers, 2004 IEEE International Solid-State Circuits Conference(ISSCC), San Francisco, California, Feb. 15-19, 2004, pp. 322-323.
  131. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, "Micromechanical hollow-disk ring resonators," Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004 , pp. 821-824.
  132. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "UHF micromechanical extensional wine-glass mode ring resonators," Technical Digest, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 953-956.

 

Patents

  1. Sheng-Shian Li, Hung-Yu Chen, Ming-Huang Li, Po-I Shih “Capacitive ultrasonic transducer device, manufacturing method thereof and transducer array,”US Patent , US20240099695A1, Mar. 28, 2024.
  2. 李昇憲,陳弘侑,李銘晃,施柏翊 “電容式超聲波傳感裝置、其製造方法及傳感陣列,”中華民國專利，(TW202415270A, 2024/04/01)
  3. 李昇憲,羅傑斯,嘉佳,翁健豪, “加速度感測結構及加速度感測器,”中華民國專利，(TW202141043A, 2021/11/01)
  4. Li SS, Ganesh RH, Pillai G, Weng CH, “Acceleration sensing structure and accelerometer,”US Patent, US11287440B2, August 26, 2021.
  5. 李昇憲,嘉佳, “產生高階諧振頻率的方法及其微機電共振子,”中華民國專利,(TW I711273 B,2020/11/21)
  6. Li SS, Pillai G, “Method for generating high order harmonic frequencies and mems resonator,”US Patent, US20200382097A1, December 3, 2020.
  7. 李昇憲,劉廷淵 “熱致動振盪式懸浮微粒感測裝置及懸浮微粒感測方法,”中華民國專利,(TW I647435 B,2019/01/11).
  8. Sheng-Shian Li and Ting-Yuan Liu, “Thermal-Piezoresistive Oscillator-Based Aerosol Sensor and Aerosol Sensing Method,” US Patent , US10705053B2, July 07, 2020.
  9. 李昇憲,嘉佳, “共振器及共振器模組,” 中華民國專利,(TW I659553 B, 2019/05/11).
  10. Sheng-Shian Li and Gayathri Pillai, “Method for Generating High Order Harmonic Frequencies and MEMS Resonator,” Under US Patent Review (16/578,422 ; 2019/09/23).
  11. Sheng-Shian Li and Gayathri Pillai, “Resonator and Resonator Array,” US Patent, US10511280B2, December 17, 2019.
  12. Sheng-Shian Li and Ming-Huang Li, “Active type temperature compensation resonator structure,” US Patent 20,150,326,199 A1, February 20, 2018.
  13. Sheng-Shian Li, Chao-Yu Chen, and Ming-Huang Li, “CMOS-MEMS Resonant Transducer and Method for Fabricating The Same,” US Patent 20170217764 A1, August 03, 2017.
  14. Sheng-Shian Li and Cheng-Chi Chen, “MEMS Resonator Active Temperature Compensation Method and Thermally-Actuated MEMS Resonator,” US Patent 9,630,830 B2, April 25, 2017.
  15. Sheng-Shian Li, Kuan-Hsien Li, and Cheng-Chi Chen, “Ultra Low Power Thermally-Actuated Oscillator and Driving Circuit Thereof,” US Patent 9,621,105 B2, April 11, 2017. (NTHU-14013-US).
  16. Sheng-Shian Li, Seungbae Lee, Kushal Bhattacharjee, “Method for Manufacturing a Vibrating MEMS Circuit,” US Patent 9,369,105 B1, June 14, 2016.
  17. 李昇憲、李冠賢、陳政吉, “超低功率熱致動振盪器及其驅動電路,” 中華民國專利，I569571，2017/2/1-2035/6/24.
  18. 李昇憲、陳昭瑜、李銘晃, “CMOS-MEMS諧振換能器及其製造方法,”中華民國專利，I562224，2016/12/11-2036/1/29.
  19. 李昇憲、陳政吉, “微機電共振器之主動式溫度補償方法及其共振器,”中華民國專利，I538396，2016/06/11-2033/05/19.
  20. 李昇憲、李銘晃, “主動式溫度補償共振器結構,”中華民國專利，I538395，2016/06/11-2034/05/06.
  21. 李昇憲, 侯立人, 李承勳, “微機電共振震盪子結構及其驅動方法,”中華民國專利，I511916，2015/12/11-2032/06/27.
  22. 李昇憲, 李承勳, “微機電共振器及其訊號處理方法以及製造方法,”中華民國專利，I519066，2016/01/21-2032/6/27.
  23. Sheng-Shian Li, Li-Jen Hou, and Cheng-Syun Li, “Micromechanical resonator oscillator structure and driving method thereof,” US Patent 9,024,708 B2, May 5, 2015.
  24. Sheng-Shian Li and Cheng-Syun Li, “MEMS Resonator, Manufacturing Method Thereof, and Signal Processing Method Using MEMS Resonator,” US Patent 8,854,149 B2, Oct. 7, 2014.
  25. Sheng-Shian Li and Cheng-Syun Li, “MEMS Resonator, Manufacturing Method Thereof, and Signal Processing Method Using MEMS Resonator,” US Patent Granted, Aug. 5, 2014.
  26. Seungbae Lee, Sheng-Shian Li, and Kushal Bhattacharjee,“Planarized Sacrificial Layer for MEMS Fabrication,” US Patent 8,278,802 B1, Oct. 2, 2012.
  27. Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer Having Domain Inversions (Continuation),” US Patent 8,035,280 B2, Oct. 2011.
  28. Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer Having Domain Inversions,” US Patent 7,898,158 B1, March 2011.
  29. [ Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer,” US Patent 7,586,239 B1, Sept. 2009.
  30. Clark T.-C Nguyen, Yu-Wei Lin, Sheng-Shian Li, and Yuan Xie, “Micromechanical Structures Having a Capacitive Transducer Gap Filled with a Dielectric and Method of,” US Patent 7,551,043 B2, 2009.
  31. Clark T.-C Nguyen and Sheng-Shian Li, “High-Q Micromechanical Resonator Devices and Filters Utilizing Same,” US Patent 7,295,088 B2, 2007.
  32. Shuo-Hung Chang and Sheng-Shian Li, “Drive of a Wafer Stepper,” US Patent 6,459,473 B2, 10/2002-07/2020.
  33. Shuo-Hung Chang and Sheng-Shian Li, “A Wafer Stepping Mechanism,” ROC Patent No. 186689, Taiwan, 09/2003-07/2018.
  34. Shuo-Hung Chang, Yu-Bin Chen, and Sheng-Shian Li, “A High Precision Positioning Rotary Stage,” ROC Patent No. 161390, Taiwan, 06/2000~04/2011.
  35. Li-Yuan Sung, et al., “A Novel Stirrer,” ROC Patent, No. 145887, Taiwan, 03/1999-09/2009.
  36. Shuo-Hung Chang and Sheng-Shian Li, “A Novel Micro Linear Translation Device with High Resolution and Long Travel Range,” ROC Patent, No. 134252, Taiwan, 03/1998~06/2009.

     

Domestic Conference Papers:

  1. 曾冠儒、黃宥閎、李銘晃、李昇憲,“三軸電容式微機電陀螺儀研製,” 第21屆奈米工程暨微系統技術研討會, 深坑, June 1-2, 2018.
  2. G. W. Fang, G. Pillai, M.-H. Li, C.-Y. Liu, and S.-S. Li,“利用二氧化矽達到溫度補償之高品質因數鈮酸鋰共振器於低相位雜訊之應用,” 第21第21屆奈米工程暨微系統技術研討會, 深坑, June 1-2, 2018. (最佳產業應用獎).

  3. 徐子軒、劉峻佑、李昇憲、李銘晃、陳昭瑜,“一個200奈米感測間隙且基於CMOS-MEMS平台下利用氮化鈦製程 設計之可運用於生醫超聲波應用的微機電電容式超聲波感測元件,” 第21屆奈米工程暨微系統技術研討會, 深坑, June 1-2, 2018.
  4. G. Pillai and S.-S. Li,“Support transducer design to enable piezoelectrically transduced Lamé-mode resonator and oscillator,” 第21屆奈米工程暨微系統技術研討會, 深坑, June 1-2, 2018.
  5. 仁頡、劉峻佑、李銘晃、陳政吉、陳昭瑜、李承勳、李昇憲, “環耦合微機電陀螺儀之設計與實現,” 第19屆奈米工程暨微系統技術研討會,台北, Aug. 13-14, 2015. (Best Paper Award Winner)
  6. 蘇煥鈞、李銘晃、陳昭瑜、李昇憲,“使用深次微米間隙傳感及高剛性驅動機制之CMOS-MEMS共振器陣列實現全整合式單晶片振盪器,” 第19屆奈米工程暨微系統技術研討會, 台北, Aug. 13-14, 2015.
  7. 秦啟航、李昇憲, “陳昭瑜、李銘晃、李昇憲, “具備電性與機械耦合技術之模態可重組式CMOS-MEMS濾波器,” 第18屆奈米工程暨微系統技術研討會, 台南, Aug. 21-22, 2014.(Best Paper Award)
  8. Ming-Huang Li and Sheng-Shian Li, “Temperature-compensated monolithic CMOS-MEMS oscillators for timing reference and sensor applications,” 第18屆奈米工程暨微系統技術研討會, 台南, Aug. 21-22, 2014.(Honorable Mention Award)
  9. 秦啟航、李昇憲, “A CMOS-MEMS Resonant Gate Array Transistor,” 第20屆奈米元件技術研討會, 新竹, April 25-26, 2013. (Best Student Paper Award)
  10. 陳昭瑜、李銘晃、李承勳、李昇憲, “機械耦合式CMOS-MEMS濾波器之設計與特性探討,” 第17屆奈米工程暨微系統技術研討會, 台中, Aug. 22-23, 2013. (Oral Presentation)
  11. 莊捷旭、李承勳、李銘晃、李昇憲, “高Q值微機械震盪器研製與探討差動機制對微機械震盪器的影響,” 第17屆奈米工程暨微系統技術研討會, 台中, Aug. 22-23, 2013. (Oral Presentation)
  12. 于煥澤、陳政吉、李昇憲, “熱致動與壓阻感測式高頻微機械共振器,” 第15屆奈米工程暨微系統技術研討會, 台北, Sept. 6-7, 2011. (Oral Presentation)
  13. 陳文健、方維倫、李昇憲, “Quasi-linear Frequency Tuning for CMOS-MEMS Resonators ,” 第15屆奈米工程暨微系統技術研討會, 台北, Sept. 6-7, 2011. (Best Paper Award Winner)
  14. 陳文健、方維倫、李昇憲, “具次微米間隙之高Q值整合式CMOS-MEMS共振器,” 第14屆奈米工程暨微系統技術研討會, 高雄, Sept. 2-3, 2010. (Oral Presentation)
  15. 劉育嘉、蔡明翰、陳文健、李昇憲、方維倫, “出平面CMOS-MEMS 微型共振器設計分析與實現,” 第14屆奈米工程暨微系統技術研討會, 高雄, Sept. 2-3, 2010. (Oral Presentation)
  16. K. Bhosale and S.-S. Li, "A An Ultra-Compact Oscillating MEMS Active Pixel Arrays with Integrated CMOS Front-Ends,” ICSS 2021, Online, Oct 14-15, 2021.
  17. C.-Y. Chang and S.-S. Li et al., "A piezoelectric MEMS mode-matched gyroscope based on secondary elliptical mode,” ICSS 2021, Online, Oct 14-15, 2021.
  18. K.-W. Tang and S.-S. Li et al., "Design of AlN Thin Film Piezoelectric MEMS Resonator for Magnetic Sensor Application,” ICSS 2021, Online, Oct 14-15, 2021.
  19. Z.-W. Lin and S.-S. Li et al., "Wide-range thermal-piezoresistive pressure sensor based on an integrated CMOS-MEMS oscillator,” ICSS 2021, Online, Oct 14-15, 2021.
 

 

Technical Articles:

  1. CMOS-MEMS共振器及其應用, 陳昭瑜、李銘晃、李昇憲, 奈微米機電系統專輯, 電子月刊, Jan. 2014, pp. 105-125.
  2. CMOS-MEMS共振式閘極陣列電晶體, 秦啟航、李昇憲, 奈米通訊 (Nano Communication), 20卷, No. 2, June 2013. pp. 21-26.
  3. A Fully-Differential CMOS-MEMS Resonator Integrated with an On-Chip Amplifier, 韋納克, 李承勳,李昇憲, 第二十八期活動報導, 微系統暨奈米科技協會會刊, 2012, pp. 38-44.
  4. 第18屆世界微機電高峰會議活動報導, 李昇憲, 第二十七期活動報導, 微系統暨奈米科技協會會刊, 2012.
  5. TRANSDUCERS’11研討會活動報導, 陳文健、李昇憲, 第二十六期專題報導, 微系統暨奈米科技協會會刊, 2011.
  6. 第二十三屆國際電機電子協會微機電系統國際會議(IEEE MEMS 2010)報導, 陳文健、李昇憲, 第二十三期專題報導, 微系統暨奈米科技協會會刊, 2010, pp. 1-13.
  7. MEMS在射頻無線通訊上的應用, 李昇憲, 第二十期專題報導, 微系統暨奈米科技協會會刊, 2010, pp. 6-18.

 

Book Chapters:

  1. Sheng-Shian Li, “CMOS-MEMS Resonators,” Encyclopedia of Nanotechnology,Springer,2015. ISBN: 978-94-007-6178-0
  2. Weileun Fang, Sheng-Shian Li, Yi Chiu, Ming-Huang Li, “3D and Circuit Integration of MEMS - MEMS Using CMOS Wafer,” John Wiley & Sons, 2021. ISBN: 978-3527346479