RF MicroSystems Lab, NTHU
PUBLICATIONS
Journal Papers:
[1] C.-S. Li, M.-H. Li, and S.-S. Li, “ Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100nm gaps,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), accepted for publication.
[2] K.-C. Fang, C.-H. Chu, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Cost-effective and highly sensitive cholesterol microsensors with fast response based on the enzyme-induced conductivity change of polyaniline,” Applied Physics Letters (APL), vol. 105, pp. 113304, 2014.
[3] M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Design and characterization of a dual-mode CMOS-MEMS resonator for TCF manipulation,” IEEE/ASME J. Microelectromech. Syst. (JMEMS).
[4] M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator,” IEEE/ASME J. Microelectromech. Syst. (JMEMS).
[5] C.-H. Chin, C.-S. Li, M.-H. Li, Y.-L. Wang, S.-S. Li, “Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor,” J. Micromech. Microeng. (JMM)..
[6] C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically coupled CMOS-MEMSfilters for channel-select applications,”Sensors and Actuators A: Physical, In Press, April, 2014.
[7] K.-C. Fang, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-C. Huang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Realization of an ultra-sensitive hydrogen peroxide sensor with conductance change of horseradish peroxidase-immobilized polyaniline and investigation of the sensing mechanism,” Biosensors and Bioelectronics, Dec., 2013, DOI information: 10.1016/j.bios.2013.12.029.
[8] Y.-R. Hsu, Y.-W. Kang, J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-k. Chang, C.-C. Huang, C.-P. Hsu, T.-h. Huang, Y.-F. Huang, Y.-C. Sun, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “Investigation of C-terminal domain of SARS nucleocapsid protein–Duplex DNA interaction using transistors and binding-site models,” Sensors and Actuators B: Chemical, vol. 193, pp. 334- 339, 2014.
[9] J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-P. Hsu, Y.-W. Kang, K.-C. Fang, W.-L. Kao, D.-J. Yao, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J.-A. Yeh, F. Ren, and Y.-L. Wang, “Viscosity-dependent drain current noise of AlGaN/GaN high electron mobility transistor in polar liquids,” J. Appl. Phys., vol. 114, 204503, 2013.
[10] C.-S. Li, M.-H. Li, C.-H. Chin, and S.-S. Li, “Differentially piezoresistive sensing for CMOS-MEMS resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 6, pp. 1361-1372, Dec. 2013.
[11] Y.-C. Liu, M.-H. Tsai, W.-C. Chen, M.-H. Li, S.-S. Li, and W. Fang, “Temperature-compensated CMOS-MEMS oxide resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 5, pp. 1054-1065, Oct. 2013.
[12] S.-S. Li and C.-M. Cheng, “Analogy among microfluidics, micromechanics, and microelectronics,” Lab on a Chip, vol. 13, pp. 3782-3788, July, 2013.
[13] V. Pachkawade, M.-H. Li, C. S. Li, and S.-S. Li, “A CMOS-MEMS resonator integrated system for oscillator application,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2882-2889, Aug. 2013.
[14] C.-C. Huang, G.-Y. Lee, J.-I. Chyi, H.-T. Cheng, C.-P. Hsu, Y.-R. Hsu, C.-H. Hsu, Y.-F. Huang, Y.-C. Sun, C.-C. Chen, S,-S, Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “AlGaN/GaN high electron mobility transistors for protein–peptide binding affinity study,” Biosensors and Bioelectronics, vol. 41, pp. 717-722, March 2013.
[15] M.-H. Li, W.-C. Chen, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators,” IEEE Sensors Journal, vol. 12, no. 12, pp. 3399-3407, Dec. 2012.
[16] Y.-C. Lee, M.-H. Li, Y. T. Cheng, W. Hsu, and S.-S. Li, “Electroplated Ni-CNT nanocomposite for micromechanical resonator applications,” IEEE Electron Device Letters (EDL), vol. 33, no. 6, pp. 872-874, June 2012.
[17] W.-C. Chen, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps and quasi-linear frequency tuning,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 21, no. 3, pp. 688-701, June 2012.
[18] W.-C. Chen, M.-H. Li, Y.-C. Liu, W. Fang, and S.-S. Li, “A fully-differential CMOS-MEMS DETF oxide resonator with Q > 4,800 and Positive TCF,” IEEE Electron Device Letters (EDL), vol. 33, no. 5, pp. 721-723, May 2012.
[19] L.-J. Hou and S.-S. Li, “High-stiffness driven micromechanical resonators with enhanced power handling,” Applied Physics Letters (APL), vol. 100, no. 13, pp. 131908, 2012. (Selected for the issue of Virtual Journal of Nanoscale Science & Technology)
[20] M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 59, no. 3, pp. 346-357, March 2012.
[21] C.-S. Li, L.-J. Hou, and S.-S. Li, “Advanced
CMOS-MEMS resonator platform,” IEEE Electron Device Letters (EDL), vol. 33, no. 2,
pp. 272-274, Feb. 2012.
[22] W.-C. Chen, W. Fang, and S.-S. Li, “A
generalized CMOS-MEMS platform for micromechanical resonators monolithically
integrated with circuits,” J. Micromech. Microeng. (JMM), vol. 21, no. 6, pp. 065012, May 2011.
[23] C.-H. Chin, T.-F. Lu, J.-C. Wang, J.-H. Yang, C.-E. Lue,
C.-M. Yang, S.-S. Li, and C.-S. Lai, “Effects
of CF4 Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable
Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2 Layer Grown by Atomic
Layer Deposition,” Japanese Journal of Applied Physics (JJAP),
vol. 50, no. 4, pp. 04DL06-1-5, April 2011.
[24] Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen,
“1.52-GHz
micromechanical extensional wine-glass mode ring resonators,” IEEE
Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
(T-UFFC), vol. 55, no. 4, pp. 890-907, April 2008.
[25] Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C.
Nguyen, “Series-resonant
VHF micromechanical resonator reference oscillators,” IEEE J.
Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
Conference Papers
[1] M.-H. Li, C.-Y. Chen, C.-H. Chin, C.-S. Li, and S.-S. Li, “Optimizing the close-to-carrier phase noise of monolithic CMOS-MEMS oscillators using bias-dependent nonlinearity,” to be presented in the, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014.
[2] K.-H. Li, C.-C. Chen, M.-H. Li, and S.-S. Li, “A self-sustained nanomechanical thermal-piezoresistive oscillator with ultra-low power consumption,” to be presented in the, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014.
[3] Y.-J. Liao, T.-W. Kuo, and S.-S. Li, “Design and characterization of CMOS-MEMS capacitive micromachined ultrasonic transducers,” to be presented in the 8th International Conference on Nano/Molecular Medicine and Engineering (IEEE-NanoMed), Kaohsiung, Taiwan, Nov. 9-12, 2014.
[4] C.-H. Chin and S.-S. Li, “A CMOS-MEMS Arrayed RGFET,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 325-326.
[5] M.-H. Li, C.-Y. Chen, and S.-S. Li, “An Experimental Investigation on the Q-Boosted CMOS-MEMS Flexural-Mode Resonator Circuits,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 327-328.
[6] C.-S. Li*. J. Lee*, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, Philip, X.-L. Feng “Multimode Characteristics of High-Frequency CMOS-MEMS Resonators,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 478-480. (*Co-first authors)
[7] C.-S. Li*, J. Lee*, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, Philip, X.-L. Feng “Exploring Parametric Resonance Effects in Bulk-Mode CMOS-MEMS Resonators,” Proceedings, 2014 Joint Conf. of the IEEE Int. Frequency Control Symp. Taipei, Taiwan, May 19-22, 2014, pp. 329-331. (*Co-first authors)
[8] C.-Y. Chen, M.-H. Li, C.-H. Chin, C.-S. Li, and S.-S. Li, “Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters,” Proceedings, 27th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’14), San Francisco, CA, Jan. 26-30, 2014, pp.1249-1252.
[9] M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, C.-C. Chen, and S.-S. Li, “Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators,” Dig. of Tech. Papers, the 2013 IEEE International Electron Devices Meeting (IEDM’13), Washington, DC, Dec. 9-11, 2013, pp. 475-478.
[10] S.-S. Li, “CMOS-MEMS resonators and their applications,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 915-921. (Invited)
[11] M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 539-542.
[12] C.-S. Li, M.-H. Li, C.-H. Chin, C.-Y. Chen, P. X.-L. Feng, and S.-S. Li, “A piezoresistive CMOS-MEMS resonator with high Q and low TCf,” Proceedings, 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 425-428.
[13] W. Fang, S.-S. Li, C.-L. Cheng, C.-I. Chang, W.-C. Chen, Y.-C. Liu, M.-H. Tsai, and C. Sun, “CMOS MEMS: A key technology towards the “More than Moore” era,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2513-2518. (Invited)
[14] C.-H. Chin, M.-H. Li, and S.-S. Li, “A CMOS-MEMS resonant-gate transistor,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2284-2287.
[15] C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters,”Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2288-2291.
[16] H. Zhu, C.-H. Chuang, C.-S. Li, M.-H. Li, J. E.-Y. Lee, and S.-S. Li, “The effects of tight capacitive coupling on phase noise performance: A LAMÉ-mode MEMS oscillaor study,”Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2304-2307.
[17] W.-C. Chen, M.-H. Li, Y.-C. Liu, D. Weinstein, W. Fang, and S.-S. Li, “Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 2292-2295.
[18] Y.-C. Liu, M.-H. Tsai, S.-S. Li, and W. Fang, “A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona. Spain, June 16-20, 2013, pp. 610-613.
[19] S.-S. Li, “Advances of CMOS-MEMS technology for resonator applications,” Proceedings, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS’13), Suzhou, China, April 7-10, 2013. (Invited)
[20] C.-C. Chen, H.-T. Yu, K.-H. Lee, and S.-S. Li, “Enhancement of temperature stability via constant structural-resistance control for MEMS resonators,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 765-768.
[21] M.-H. Li, C.-S. Li, C.-H. Chin, C.-Y. Chen, and S.-S. Li, “An ultra-low power ovenized CMOS-MEMS resonator monolithically integrated with interface circuits,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 753-756.
[22] T.-T. Chen, J.-C. Huang, Y.-C. Peng, C.-H. Chu, C.-H. Lin, E. Cheng, S.-S. Li, “A 17.6-MHz 2.5V ultra-low polarization voltage MEMS oscillator using an innovative high gain-bandwidth fully differential transimpedance voltage amplifier,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 741-744.
[23] V. Pachkawade, C.-S. Li, and S.-S. Li, “A Fully-Differential CMOS-MEMS Resonator Integrated with an On-Chip Amplifier,” Proceedings, 2012 IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
[24] H.-H. Lai, W.-C. Chen, and S.-S. Li, “A low-actuation voltage design for RF CMOS-MEMS switches,” Proceedings, 2012 IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
[25] C.-S. Li, M.-H. Li, and S.-S. Li, “Differential measurement of piezoresistive transduction for silicon-based MEMS resonators,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 1-4.
[26] C.-C. Chen, M.-H. Li, W.-C.
Chen, H.-T. Yu, and S.-S. Li, “Thermally-actuated and piezoresistively-sensed
CMOS-MEMS resonator array using differential-mode operation,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May
21-24, 2012, pp. 1-4.
[27] W.-C. Chen, W. Fang, and S.-S.
Li, “VHF CMOS-MEMS oxide resonators with Q > 10,000,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore,
Maryland, May 21-24, 2012, pp. 1-4.
[28] M.-H. Li, C.-S. Li, L.-J. Hou,
Y.-C. Liu, and S.-S. Li, “A 1.57mW 99dBW CMOS transimpedance amplifier for VHF
micromechanical reference oscillators,” Proceedings, 2012 IEEE
International Symposium on Circuits and Systems (ISCAS’12), Seoul, Korea, May
20-23, 2012, pp. 209-212.
[29] L.-J. Hou, C.-S. Li, and S.-S.
Li, “High-stiffness-driven micromechanical resonator oscillator with enhanced
phase noise performance,” Proceedings, 25th IEEE Int. Micro Electro
Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp.
700-703.
[30] C.-S. Li, C.-H. Chin, and S.-S.
Li, “Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf.
(MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 539-542.
[31] C.-C. Chen, H.-T. Yu, and S.-S. Li, “A balanced measurement
and characterization technique for thermal-piezoresistive micromechanical
resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical
Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 377-380.
[32] T.-H. Yen, M.-H. Tsai, C.-I Chang, Y.-C. Liu, S.-S. Li, R.
Chen, and W. Fang, “Improvement
of CMOS-MEMS accelerometer using the symmetric layers stacking design,” Proceedings, IEEE Sensors Conference, Limerick, Ireland, Oct. 28-31,
2011, pp. 145-148.
[33] N. Bhalla, S.-S. Li, and D. W.-Y. Chung, “Finite
element analysis of MEMS square piezoresistive accelerometer designs with low
crosstalk,” Proceedings, 2011 International Semiconductor
Conference (CAS’11), Sinaia, Romania, Oct.17-19, 2011, pp. 353-356.
[34] C.-S. Li and S.-S. Li, “Capacitive gap-aspect-ratio
enhancement using advanced CMOS process for CMOS-MEMS resonators,” Proceedings, 9th International Workshop on High Aspect Ratio Micro
Structure Technology (HARMST’11), Hsinchu, Taiwan, June 12-18, 2011, pp.
47-48.
[35] Y.-C. Liu, M.-H. Tsai, W.-C. Chen, S.-S. Li, and W. Fang,
“High-Q,
large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded
metal electrodes,” Dig. of Tech. Papers, the 16th Int. Conf. on
Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9,
2011, pp. 934-937.
[36] M.-H. Li, W.-C. Chen, and S.-S. Li, “CMOS-MEMS
transverse-mode square plate resonator with high Q and low motional
impedance,” Dig. of Tech. Papers, the 16th Int. Conf. on
Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9,
2011, pp. 1500-1503.
[37] M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled
CMOS-MEMS free-free beam resonator arrays with two-port configuration,” Proceedings, 2011 Joint Conference of the IEEE International Frequency
Control Symposium and European Frequency and Time Forum (IFCS’11), San
Francisco, May 2-5, 2011, pp. 1-4.
[38] W.-C. Chen, W. Fang, and S.-S. Li, “Quasi-linear
frequency tuning for CMOS-MEMS resonators,” Proceedings, 24th IEEE
Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’11), Cancun, Mexico,
January 23-27, 2011, pp.340-343.
[39] W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps,” Proceedings, 2010 IEEE Int. Frequency Control Symp. (IFCS’10), Newport
Beach, California, June 2-4, 2010, pp. 340-343.
[40] W.-C. Chen, C.-S. Chen, K.-A. Wen, L.-S Fan, W. Fang, and
S.-S. Li, “A
generalized foundry CMOS platform for capacitively-transduced resonators
monolithically integrated with amplifiers,” Proceedings, 23rd Int.
IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28,
2010, pp. 204-207.
[41] W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “Realizing
deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning
capability via modulated boundary conditions,” Proceedings, 23rd
Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan.
24-28, 2010, pp. 735-738.
[42] Y. Lin, W.-C. Li, I. Gurin, S.-S. Li, Y.-W. Lin, Z. Ren, B.
Kim, and C. T.-C. Nguyen, “Digitally-Specified
Micromechanical Displacement Amplifiers,” Dig. of Tech. Papers, the
15th Int. Conf. on Solid-State Sensors & Actuators (Transducers’09),
Denver, Colorado, June 21-25, 2009, pp. 781-784.
[43] S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “An
MSI micromechanical differential disk-array filter,” Dig. of Tech.
Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators
(Transducers’07), Lyon, France, June 10-14, 2007, pp. 307-311.
[44] W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF nickel
micromechanical spoke-supported ring resonators,” Dig. of Tech.
Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators
(Transducers’07), Lyon, France, June 10-14, 2007, pp. 323-326.
[45] Y.-W. Lin, Y. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen,
“Quality
factor boosting via mechanically-coupled arraying,” Dig. of Tech.
Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators
(Transducers’07), Lyon, France, June 10-14, 2007, pp. 2453-2456.
[46] S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “A
micromechanical parallel-class disk-array filter,” Proceedings,
2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May
29-June 1, 2007, pp. 1356-1361.
[47] L.-W. Hung, C. T.-C. Nguyen, Y. Xie, Y.-W. Lin, S.-S. Li,
and Z. Ren, “UHF
micromechanical compound-(2,4) mode ring resonators with solid-gap
transducers,” Proceedings, 2007 IEEE Int. Frequency Control Symp.
(IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375.
[48] S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Disk-array
design for suppression of unwanted modes in micromechanical composite-array
filters,” Proceedings, 19th Int. IEEE Micro Electro Mechanical
Systems Conf. (MEMS’06), Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869.
[49] Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Low phase
noise array-composite micromechanical wine-glass disk oscillator,” Technical Digest, 2005 IEEE International Electron Devices Meeting
(IEDM’05), Washington, DC, Dec. 5-7, 2005, pp. 287-290.
[50] S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C.
Nguyen, “Small
% bandwidth design of a 431-MHz notched-coupled micromechanical hollow-disk
ring mixer-filter,” Proceedings, IEEE International Ultrasonics
Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp.
1295-1298.
[51] S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C.
Nguyen, “Charge-based
vibrating micromechanical resonators,” Proceedings, IEEE
International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept.
18-21, 2005, 1596-1599.
[52] Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators," Proceedings, IEEE International Ultrasonics Symposium, Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1592-1595.
[53] S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, "Self-switching vibrating micromechanical filter bank," Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141. (student paper finalist award)
[54] Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive-transducer gaps," Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134. (best student paper award winner)
[55] Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, "Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators," Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami Beach, Florida, Jan. 30-Feb. 3, 2005, pp. 219-222.
[56] M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, "Post-fabrication laser trimming of? micromechanical filters," Technical Digest, IEEE Int. Electron Devices Mtg., San Francisco, California, Dec. 13-15, 2004, pp. 32-49. (student paper finalist award)
[57] S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Bridged micromechanical filters," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.
[58] Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine glass micromechanical disk reference oscillator," Digest of Technical Papers, 2004 IEEE International Solid-State Circuits Conference(ISSCC), San Francisco, California, Feb. 15-19, 2004, pp. 322-323.
[59] S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, "Micromechanical hollow-disk ring resonators," Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004 , pp. 821-824.
[60] Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "UHF micromechanical extensional wine-glass mode ring resonators," Technical Digest, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 953-956.
Patents
[1] Sheng-Shian Li and Cheng-Syun Li, “MEMS Resonator, Manufacturing Method Thereof, and Signal Processing Method Using MEMS Resonator,” US Patent Granted, Aug. 5, 2014.
[2] Seungbae Lee, Sheng-Shian Li, and Kushal Bhattacharjee,“Planarized Sacrificial Layer for MEMS Fabrication,” US Patent 8,278,802 B1, Oct. 2, 2012.
[3] Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer Having Domain Inversions (Continuation),” US Patent 8,035,280 B2, Oct. 2011.
[4] Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS
Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer Having
Domain Inversions,” US Patent 7,898,158 B1, March 2011.
[5] Sheng-Shian Li, Seungbae Lee, and Kushal Bhattacharjee, “MEMS
Vibrating Structure Using a Single-Crystal Piezoelectric Thin Film Layer,”
US Patent 7,586,239 B1, Sept. 2009.
[6] Clark T.-C Nguyen, Yu-Wei Lin, Sheng-Shian Li, and Yuan Xie, “Micromechanical
Structures Having a Capacitive Transducer Gap Filled with a Dielectric and
Method of,” US Patent 7,551,043 B2, 2009.
[7] Clark T.-C Nguyen and Sheng-Shian Li, “High-Q Micromechanical Resonator Devices and Filters Utilizing Same,” US Patent
7,295,088 B2, 2007.
[8] Shuo-Hung Chang and Sheng-Shian Li, “Drive
of a Wafer Stepper,” US Patent 6,459,473 B2, 10/2002-07/2020.
[9] Shuo-Hung Chang and Sheng-Shian Li, “A Wafer Stepping Mechanism,”
ROC Patent No. 186689, Taiwan, 09/2003-07/2018.
[10] Shuo-Hung Chang, Yu-Bin Chen, and Sheng-Shian Li, “A High
Precision Positioning Rotary Stage,” ROC Patent No. 161390, Taiwan,
06/2000~04/2011.
[11] Li-Yuan Sung, et al., “A Novel Stirrer,” ROC Patent, No.
145887, Taiwan, 03/1999-09/2009.
[12] Shuo-Hung Chang and Sheng-Shian Li, “A Novel Micro Linear
Translation Device with High Resolution and Long Travel Range,” ROC Patent, No.
134252, Taiwan, 03/1998~06/2009.
Domestic Conference Papers:
[1] 秦啟航、李昇憲, “陳昭瑜、李銘晃、李昇憲, “具備電性與機械耦合技術之模態可重組式CMOS-MEMS濾波器,” 第18屆奈米工程暨微系統技術研討會, 台南, Aug. 21-22, 2014.(Best Paper Award)
[2] Ming-Huang Li and Sheng-Shian Li, “Temperature-compensated monolithic CMOS-MEMS oscillators for timing reference and sensor applications,” 第18屆奈米工程暨微系統技術研討會, 台南, Aug. 21-22, 2014.(Honorable Mention Award)
[3] 秦啟航、李昇憲, “A CMOS-MEMS Resonant Gate Array Transistor,” 第20屆奈米元件技術研討會, 新竹, April 25-26, 2013. (Best Student Paper Award)
[4] 陳昭瑜、李銘晃、李承勳、李昇憲, “機械耦合式CMOS-MEMS濾波器之設計與特性探討,” 第17屆奈米工程暨微系統技術研討會, 台中, Aug. 22-23, 2013. (Oral Presentation)
[5] 莊捷旭、李承勳、李銘晃、李昇憲, “高Q值微機械震盪器研製與探討差動機制對微機械震盪器的影響,” 第17屆奈米工程暨微系統技術研討會, 台中, Aug. 22-23, 2013. (Oral Presentation)
[6] 于煥澤、陳政吉、李昇憲, “熱致動與壓阻感測式高頻微機械共振器,” 第15屆奈米工程暨微系統技術研討會, 台北, Sept. 6-7, 2011. (Oral Presentation)
[7] 陳文健、方維倫、李昇憲, “Quasi-linear Frequency Tuning for CMOS-MEMS Resonators ,” 第15屆奈米工程暨微系統技術研討會, 台北, Sept. 6-7, 2011. (Best Paper Award Winner)
[8] 陳文健、方維倫、李昇憲, “具次微米間隙之高Q值整合式CMOS-MEMS共振器,” 第14屆奈米工程暨微系統技術研討會, 高雄, Sept. 2-3, 2010. (Oral Presentation)
[9] 劉育嘉、蔡明翰、陳文健、李昇憲、方維倫, “出平面CMOS-MEMS 微型共振器設計分析與實現,” 第14屆奈米工程暨微系統技術研討會, 高雄, Sept. 2-3, 2010. (Oral Presentation)
Technical Articles:
[1] CMOS-MEMS共振器及其應用, 陳昭瑜、李銘晃、李昇憲, 奈微米機電系統專輯, 電子月刊, Jan. 2014, pp. 105-125.
[2] CMOS-MEMS共振式閘極陣列電晶體, 秦啟航、李昇憲, 奈米通訊 (Nano Communication), 20卷, No. 2, June 2013. pp. 21-26.
[3] A Fully-Differential CMOS-MEMS Resonator Integrated with an On-Chip Amplifier, 韋納克, 李承勳,李昇憲, 第二十八期活動報導, 微系統暨奈米科技協會會刊, 2012, pp. 38-44.
[4] 第18屆世界微機電高峰會議活動報導, 李昇憲, 第二十七期活動報導, 微系統暨奈米科技協會會刊, 2012.
[5] TRANSDUCERS’11研討會活動報導, 陳文健、李昇憲, 第二十六期專題報導, 微系統暨奈米科技協會會刊, 2011.
[6] 第二十三屆國際電機電子協會微機電系統國際會議(IEEE MEMS 2010)報導, 陳文健、李昇憲, 第二十三期專題報導, 微系統暨奈米科技協會會刊, 2010, pp. 1-13.
[7] MEMS在射頻無線通訊上的應用, 李昇憲, 第二十期專題報導, 微系統暨奈米科技協會會刊, 2010, pp. 6-18.