奈米工程與微系統研究所　書報討論

Seminar of Inst. NanoEngineering and MicroSystems

Pro. Wei-Chang Li

Institute of Applied Mechanics,

National Taiwan University

MEMS Resoswitches for RF Sensing & Inertial Applications

Abstract

MEMS-based resonant switch (a.k.a. “resoswitch”) has been demonstrated to yield much less parasitic capacitance with improved reliability compared to conventional MEMS switches, positioning itself as a great candidate in reducing power consumption of RF front-ends towards ultra-low power radios such as set-and-forget, true autonomous wireless sensor modulus. In addition, resoswitches could also be used to gauge the surface forces by measuring the frequency responses, which might be embedded with inertial sensors for in situ anti-stiction coating condition monitoring. In this talk, I will present the recent work on CMOS-MEMS resoswitch development for zero quiescent-power filter-amplifiers and surface condition monitoring techniques.

15:30-17:20 on Jun. 11(Mon), 2018 at Room 108 of Eng. Building I

Host：Prof. J.Andrew Yeh jayeh@mx.nthu.edu.tw Ext:42912

TA：Eva Huang     crazy8826@gmail.com