奈米工程與微系統研究所　書報討論

Seminar of Inst. NanoEngineering and MicroSystems

Pro. Jun-Bo Yoon

School of Electrical Engineering,

Korea Advanced Institute of Science and Technology

(KAIST)

Recent Advances in MEMS/NEMS switches for RF, logic and power Applications

Abstract

        Microelectromechanical Systems (MEMS) switches have been researched actively for decades since K. E.

Petersen reported the first MEMS switch in 1978 [IEEE Trans. Electron Devices, ED-25, 1241-1250, Oct. 1978].

The driving force of those researches is that the electrostatically-actuated MEMS switch has basically the same

operation principle (E-field based operation) while it can provide several advantages over a semiconductor-based

electrical switch: ideally-zero leakage current, high on/off current ratio, low power consumption, high isolation at

GHz frequencies, no need for the semiconductor substrates. Taking those advantages, MEMS switches have

been being actively adapted in radio frequency (RF) and power switching applications. This presentation details

recent advances in MEMS/NEMS switches for RF, logic and power applications. It starts with an introduction to

MEMS/NEMS switches showing operation principle, some history and recent state-of-the-art devices. Then, it

moves on to the major issues in MEMS/NEMS switches which are high actuation voltage and poor lifetime. How

people have been dealing with those major issues and lessons learned from these trials are also investigated.

This presentation will be concluded with future prospects of the MEMS/NEMS switches.

Short Bio

Microwave Theory and Techniques Society’s International Microwave Symposium in 1999. He received the

Department’s Excellent Teaching Awards in 2003, 2007, 2011, and 2016, respectively, and the University’s

Excellent Teaching Award in 2006. He has served as a TPC Member of IEEE A-SSCC 2007, Transducers 2009-

2011, IEEE MEMS 2009-2010, IEEE MEMS 2017-2018, and IEEE IEDM 2017 conferences, and as an ETPC

Member of Transducers 2013-2015. He is the designated co-general chair of IEEE MEMS 2019 conference, Seoul,

Korea.

15:30-17:20 on Jun. 4 (Mon), 2018 at Room 108 of Eng. Building I

Host：Prof. J.Andrew Yeh jayeh@mx.nthu.edu.tw Ext:42912  TA：Eva Huang crazy8826@gmail.com