奈米工程與微系統研究所　書報討論

Seminar of Inst. NanoEngineering and MicroSystems

Opening speech I.(Introduction of the Seminar course)：

Prof. Sheng-Shiang Li/ Prof. J. Andrew Yeh(INEMS, NTHU)

Speech II. Ming-Huang Li         

Department of Electrical and Computer Engineering

University of Illinois at Urbana Champaign   

Post-doctoral Research Fellow    

Title: Thin-film Lithium Niobate Acoustic Devices for Timing and Frequency Control.

Abstract

  Recent advances on the Micro/Nano-Electro-Mechanical Systems (M/NEMS) enable a new era for integrated sensor solutions toward the smart environment and infrastructure monitoring. The emerging applications such as Internet of Things (IoT), Wireless Sensor Network (WSN), and Wireless Body Area Network (WBAN) require numerous sensor nodes for continuously monitoring and tracking the environmental status or the wellness of the human beings. Moreover, it is the key technology towards the fourth industrial revolution (Industry 4.0) to enable cyber-physical systems (CPS) and Internet of Services (IoS). The RF piezoelectric (PZE) passive components play a key role for realizing ultra-low-power and compact wireless transceivers in this challenging field. By taking the advantage of high quality factor (Q) and excellent electromechanical coupling coefficient (kt2) from the PZE materials, important passive circuit components such as resonators, filters, duplexers, low-loss delay lines, and RF circulators/isolators can be designed at microscale by means of the MEMS technology. Among the PZE materials investigated so far, single-crystal lithium niobate (LiNbO3) is recognized as one of the most promising materials which features intrinsic high Q > 3,000 and kt2 > 20%. In this presentation, based on recently demonstrated record-breaking devices, the design methodology of LiNbO3 fundamental shear horizontal mode (SH0) resonators will be discussed.

Brief Biography

Dr. Li received the Ph.D. degree from the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan in 2015. From 2016 to 2017, he was a postdoctoral researcher at the Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan. Since 2017, he joined the Micro and Nanotechnology Laboratory, University of Illinois at Urbana Champaign, USA, as a postdoctoral researcher.

15:30-17:20 on Feb. 18(Mon), 2019 at Room 108 of Eng. Building I

Host：Prof. J.Andrew Yeh jayeh@mx.nthu.edu.tw Ext:42912

Contact：Yu-Chen Lin(TA) s8317947@gmail.com