奈米工程與微系統研究所　書報討論

Seminar of Inst. NanoEngineering and MicroSystems

Sukomal Dey

RF MEMS, NTHU

Post-Doc

 Micromachined Components for Microwave and Millimeterwave Applications

Abstract

When radio frequency microelectromechanical system (RF MEMS) based switches appeared more than 25 years ago, micromechanics have attracted huge attention for enabling near-ideal microwave devices. Since then, MEMS switches and circuits went through different development stages and are currently proving themselves commercially. Three dimensional micromachining has the potential to become an enabling technology for volume manufacturable microwave to millimeterwave systems. Although, reliability of MEMS devices is one of the prime challenge to meet present state-of-the-art performances due to occurrence of multiple failure modes after few cycles of operations. This reliability becomes more critical when multiple

MEMS switches operate simultaneously like in a digital phase shifters with higher number of bits (≥ 4-bit). This talk gives an overview of silicon surface micromachining capability and examples of innovative microwave devices enabled by MEMS switches; including high isolation SPDT switch, single-pole-multi-throw switching networks up to single-pole-sixteen-throw, narrow-band phase shifters over X to Ka-band, reconfigurable phase shifters from Ku-Ka-band, and Ku-V-band phase shifter bank. All phase shifters have been developed using switchedline or DMTL topology for phased array antenna. It takes multiple iterations, extensive characterizations to conclude with a reliable MEMS digital phase shifters and given prime attention in this talk. Then, the state of the art of micromachined antenna up to 77 GHz is given, including a 60 GHz antenna and a polarization reconfigurable antenna at 77 GHz. Finally, the talk concludes with brief overview on the potential of MEMS resonators in RF channel select filters for true software defined cognitive radios.                    

15:30-17:20 on Apr. 9(Mon), 2018 at Room 108 of Eng. Building I

Host：Prof. J.Andrew Yeh jayeh@mx.nthu.edu.tw Ext:42912

TA：Eva Huang     crazy8826@gmail.com